An IC-compatible polyimide pressure sensor with c~,pacitive readout

A cupacifive diffcrcatkd pres,,ure ~en,~lw has been devek~ped. The prt~cc~,, u~ed lc, r the t;ahr~e:.tion c,f the ,~ensor it, IC-compatihle. meaning tha! the device potentially can be integrated on on,.? chip with a suitable signal-condilioning clr¢lail. ~ r,en~,or fo~ a diflerential pressure of + I bar ha.', he,ll l~lbricated lind ~e,,ted with a frequenc!.-m(~Jululed detecti~.~n circuit, and g,.~,.~cl a,=.reement it, ~ound ,a,,ith the :.h.e~,relical ~.odel of the scns(*r. A nominal ~cnsiti~ iU,' ~.C/C t)f 17'7~ ha:, been measured lot a positive diffi.'rentiai pressure of I h~r. The resolution cf :he cnmplele detection system is 2.5 mbar ( 25(1 Pat. ,t/ It)g7 Else,,'ier Science S.A.